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Interview no.: 0321
Date of interview: 25 October 2005
Location: Cambridge, Massachusetts
No. of pages: 49
Interviewer:
Cyrus Mody
Minutes: 211
Sponsor: Nanotechnology
Access level: Free Access. Users may view, quote from, cite, or reproduce the oral history with the permission of CHF. Users citing interviews for purposes of publication are obliged under the terms of the CHF Oral History Program to notify CHF of publication and credit CHF using the following format: [Name of interviewee], interview by [name of interviewer] at [interview location], [interview date] (Philadelphia: Chemical Heritage Foundation, Oral History Transcript # [interview number]).
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Henry I. Smith begins the interview with a description of his childhood in New Jersey, his early aptitude in science, and his decision to pursue the sciences. After obtaining an undergraduate degree at Holy Cross College, Smith enrolled in Boston College Graduate School to pursue his interest in physics. Upon receiving his master’s degree, Smith took a research position at the Air Force Cambridge Research Laboratory (AFCRL) in order to fulfill his ROTC requirement. At AFCRL he worked with top scientists and proved himself an able researcher. Smith returned to Boston College following his stint at the Air Force to pursue his Ph.D. His research in x-ray diffraction formed the basis for his pioneering work on x-ray lithography later in his career. While working at the MIT Lincoln Laboratory, Smith realized the importance of fabrication technology and submitted a grant proposal to the National Science Foundation for building a national research and fabrication center. Despite his unsuccessful proposal, Smith established a Submicron Structures Laboratory with MIT funding. Migrating to MIT’s campus, Smith investigated a variety of lithography methods such as x-ray, conformable photomask, interferiometric immersion-projection, and zone plate array lithography. He concludes the interview by offering some insights on the semiconductor industry, and how to best develop a research culture that stimulates innovation.
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| Title & Description |
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Page No. |
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Family History and Early Life Experiences
Interest in science. Developing hobbies. Understanding chemistry. |
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1 |
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Education
Undergraduate degree at Holy Cross College. Master’s and Ph.D. in physics at Boston College. Research at the Air Force Cambridge Research Laboratory. High pressure physics at Boston College. |
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2 |
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Career at Lincoln Laboratory at the Massachusetts Institute of Technology
Interest in fabrication technology. Origins of nanofabrication. National Science Foundation funding. Influence of Jay Harris leading to proposal for National Research and Resources Facility for Submicron Structures [NRRFSS]. Building the Submicron Structure Laboratory with MIT funding. |
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5 |
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Career at MIT Campus
Working at Lincoln Laboratory and MIT campus simultaneously. Finding funding. |
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10 |
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Professional Development
Organizational cultures conducive to research. Attending Gordon Research Conferences. Feelings toward semiconductor industry. |
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19 |
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Concluding thoughts
Thoughts on different lithography techniques. Cultural obstacles to entrepreneurship in Japan. |
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33 |
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Notes
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43 |
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Index
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44 |
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| 1958 |
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B.S., Physics, Holy Cross College |
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| 1960 |
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M.S., Physics, Boston College Graduate School |
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| 1966 |
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Ph.D., Physics, Boston College Graduate School |
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| United States Air Force Cambridge Research Laboratory |
| 1960-1963 |
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1st Lieutenant |
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| Boston College |
| 1966-1968 |
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Assistant Professor of Physics |
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| Massachusetts Institute of Technology |
| 1968-1977 |
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Staff Member, Lincoln Laboratory |
| 1977-1980 |
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Group Leader, Lincoln Laboratory |
| 1977-1980 |
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Adjunct Professor of Electrical Engineering |
| 1977- |
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Director, Nanostructures Laboratory |
| 1980- |
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Professor of Electrical Engineering |
| 1990-2005 |
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Keithley Professor of Electrical Engineering |
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| 1960 |
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Member of American Physical Society
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| 1978 |
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Member of Materials Research Society [MRS]
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| 1980 |
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Member of American Vacuum Society [AVS]
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| 1987 |
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Institute of Electrical and Electronics Engineers [IEEE] Fellow
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| 1989 |
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Member of National Academy of Engineering
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| 1990 |
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Member of Optical Society of America [OSA]
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| 1995 |
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IEEE Cledo Brunetti Award
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| 2003 |
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The International Society for Optical Engineering [SPIE] Bacus Award
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Cyrus Mody is an assistant professor of History at Rice University. Prior to that position he was the manager of the Nanotechnology and Innovation Studies programs in the Center for Contemporary History and Policy at the Chemical Heritage Foundation. He has a bachelor’s degree in mechanical and materials engineering from Harvard University and a Ph.D. in science and technology studies from Cornell. He was the 2004-2005 Gordon Cain Fellow at CHF before becoming a program manager. Mody has published widely on the history and sociology of materials science, instrumentation, and nanotechnology.
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